L. Duan

High-order wavefront aberration measurement method for hyper-NA lithographic projection lens based on a binary target and rotated regression matrix

Xiang-zhao Wang, Sikun Li, Boer Zhu, 2019, Optics Communications.

Aberration measurement of lithographic projection lens by using a translational symmetry Alt-PSM grating mark

Xiang-zhao Wang, L. Duan, Q. Yuan, 2009, 2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics.

Translational-symmetry alternating phase shifting mask grating mark used in a linear measurement model of lithographic projection lens aberrations.

Lifeng Duan, Qiongyan Yuan, Zicheng Qiu, 2009, Applied optics.

Fast thermal aberration model for lithographic projection lenses.

Xiang-zhao Wang, Sikun Li, Boer Zhu, 2019, Optics express.

Adaptive denoising method to improve aberration measurement performance

Sikun Li, Anatoly Bourov, Andreas Erdmann, 2013 .

In situ aberration measurement technique based on principal component analysis of aerial image.

Bo Peng, Xiang-zhao Wang, L. Duan, 2011, Optics express.

Aerial image model and application to aberration measurement

Liang Li, Fan Wang, Zhiyong Yang, 2010, Advanced Lithography.