Ying Zhou

In-Situ Measurement & Control of Photoresist Development in Microlithography

K. Lim, A. Tay, C. Kiew, 2005 .

In Situ Measurement & Control of Photoresist Develpment in Microlithorgraphy

W. Ho, K. Lim, A. Tay, 2005, 2005 IEEE Instrumentationand Measurement Technology Conference Proceedings.

Real-time control of photoresist development process

Arthur Tay, Weng Khuen Ho, Jay H. Lee, 2005, SPIE Advanced Lithography.

In situ fault detection of wafer warpage in microlithography

A. Tay, Weng Khuen Ho, Ying Zhou, 2004, IEEE Transactions on Semiconductor Manufacturing.