E. Amanatides

A hybrid kinetic Monte Carlo method for simulating silicon films grown by plasma-enhanced chemical vapor deposition.

V. Mavrantzas, D. Mataras, C. Baig, 2013, The Journal of chemical physics.

ECWR plasma enhanced chemical vapour deposition of microcrystalline silicon thin films

E. Farsari, A. Kalampounias, D. Mataras, 2014 .

Development of a hollow cathode plasma source for microcrystalline silicon thin films deposition

D. Mataras, D. Rapakoulias, E. Amanatides, 2011 .

Photoinduced superhydrophilicity of amorphous TiOx-like thin films by a simple room temperature sol-gel deposition and atmospheric plasma jet treatment

D. Mataras, E. Amanatides, V. Vrakatseli, 2014 .

Comparative study of plasma-deposited fluorocarbon coatings on different substrates

E. Farsari, D. Rapakoulias, E. Amanatides, 2011 .

Simulation of the Electrical Properties of SiH4/H2 RF Discharges

E. Amanatides, B. Lyka, D. Mataras, 2006 .

Simulation of cylindrical electron cyclotron wave resonance argon discharges

D. Mataras, D. Rapakoulias, E. Amanatides, 2011 .