Akira Takahashi

Long-term dimensional stability of a line scale made of low thermal expansion ceramic NEXCERA

Akira Takahashi, 2012 .

Advanced lifetime PSP imaging system for pressure and temperature field measurement

K. Asai, Akira Takahashi, K. Mitsuo, 2006 .

Advanced Lifetime PSP Imaging System for Simultaneous Pressure and Temperature Measurement

Kazunori Mitsuo, Keisuke Asai, Hiroshi Mizushima, 2004 .

Improving the measurement algorithm for alignment

Shinichi Nakajima, Koji Yoshida, Yuho Kanaya, 2001, SPIE Advanced Lithography.