J. Simon

Thermal characterization of materials for double patterning

P. Trefonas, Y. Bae, G. Barclay, 2010 .

Materials for double patterning strategies: Development and application

C. Szmanda, C. Lapeyre, P. Trefonas, 2009 .

6. Lithography resists

A. Jouve, J. Simon, M. May, 2013 .

Geometry impact on ultrahigh resolution pattern collapse

Jean-Hervé Tortai, A. Jouve, J. Simon, 2007 .