N. Shibata

Plasma Chemical Vaporization Machining (CVM) for Fabrication of Optics

Y. Mori, K. Yamamura, Y. Sano, 1998 .

Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode.

Y. Mori, K. Yamamura, Y. Sano, 2002, Applied optics.

Fabrication of small complex-shaped optics by plasma chemical vaporization machining with a microelectrode.

Y. Mori, K. Yamamura, Y. Sano, 2006, Applied optics.

Subnanometer Fabrication of Optics by Plasma Chemical Vaporization Machining

K. Sugisaki, H. Takino, N. Shibata, 2002 .

Enhanced fluorescence resonance energy transfer immunoassay with improved sensitivity based on the Fab'-based immunoconjugates.

Teruyuki Nagamune, H. Ueda, N. Shibata, 2007, Analytical biochemistry.

Computer numerically controlled plasma chemical vaporization machining with a pipe electrode for optical fabrication.

Y. Mori, K. Yamamura, Y. Sano, 1998, Applied optics.

Fabrication of a complex-shaped mirror by arranging silicon mirror elements

A. Itoh, H. Takino, N. Shibata, 2004 .

Fabrication of a fly-eye mirror for an extreme-ultraviolet lithography illumination system by arranging silicon mirror elements

Hideki Komatsuda, Hideo Takino, Norio Shibata, 2002, SPIE Advanced Lithography.