Teruki Kobayashi

Plasma Chemical Vaporization Machining (CVM) for Fabrication of Optics

Y. Mori, K. Yamamura, Y. Sano, 1998 .

Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode.

Y. Mori, K. Yamamura, Y. Sano, 2002, Applied optics.

Fabrication of small complex-shaped optics by plasma chemical vaporization machining with a microelectrode.

Y. Mori, K. Yamamura, Y. Sano, 2006, Applied optics.

Subnanometer Fabrication of Optics by Plasma Chemical Vaporization Machining

K. Sugisaki, H. Takino, N. Shibata, 2002 .

Clarifying mechanism of determining tool electrode wear ratio in EDM using spectroscopic measurement of vapor density

Masanori Kunieda, M. Kunieda, Teruki Kobayashi, 2002 .

Fabrication of a fly-eye mirror for an extreme-ultraviolet lithography illumination system by arranging silicon mirror elements

Hideki Komatsuda, Hideo Takino, Norio Shibata, 2002, SPIE Advanced Lithography.

Temperature Distribution Measurement in EDM Arc Plasma Using Spectroscopy

Masanori Kunieda, Satoyuki Ojima, Wataru Natsu, 2004 .