J. Lagowski

发表

Surface Charge Imaging in Semiconductor Wafers by Surface Photovoltage (SPV)

L. Jastrzebski, P. Edelman, J. Lagowski, 1992 .

Multicrystalline solar grade silicon solar cells

R. Kopecek, A. Soiland, E. Enebakk, 2010, 2010 35th IEEE Photovoltaic Specialists Conference.

Study of Stress-Induced Leakage Current in Thin Oxides Stressed by Corona Charging in Air: Relationship to GOI Defects

D. Marinskiy, J. D’Amico, L. Jastrzebski, 1999 .

Iron detection in the part per quadrillion range in silicon using surface photovoltage and photodissociation of iron‐boron pairs

A. Hoff, W. Henley, O. Milic, 1993 .

Improvement of Diffusion Length in Polycrystalline Photovoltaic Silicon by Phosphorus and Chlorine Gettering

W. Henley, J. Lagowski, L. Jastrzebski, 1995 .

A novel approach to monitoring of plasma processing equipment and plasma damage without test structures

A. Hoff, E. Persson, K. Nauka, 1997, 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings.

Accelerated Light-Induced Degradation (ALID) for Monitoring of Defects in PV Silicon Wafers and Solar Cells

J. D’Amico, Marshall Wilson, P. Edelman, 2010 .

Review—Recent Advancement in Charge- and Photo-Assisted Non-Contact Electrical Characterization of SiC, GaN, and AlGaN/GaN HEMT

F. Horikiri, J. D’Amico, Marshall Wilson, 2017 .

Kelvin Force Microscopy and corona charging for semiconductor material and device characterization

D. Marinskiy, P. Edelman, J. Lagowski, 2016 .

Pioneering Application of Corona Charge-Kelvin Probe Metrology to Noncontact Characterization of In 0.53 Ga 0.47 As/Al 2 O 3 /HfO 2 Stack

G. Bersuker, D. Veksler, Tae-Woo Kim, 2014 .

Improvement of Poly-Silicon Thin Films and Thin Film Transistors Using Ultrasound Treatment

R. Smeltzer, S. Ostapenko, L. Jastrzebski, 1996 .

Enhanced Hydrogenation Due to Ultrasound Treatment in Polycrystalline Silicon: New Approach to Thin Film Defect Engineering

W. Henley, S. Ostapenko, L. Jastrzebski, 1995 .

Non-contact mapping of heavy metal contamination for silicon IC fabrication

W. Henley, P. Edelman, J. Lagowski, 1992 .

Ultrasound Defect Engineering of Transition Metals Via Metal-Acceptor Pairs in Silicon

R. Bell, J. Lagowski, S. Ostapenko, 1995 .

Improved QSS-μPCD measurement with quality of decay control: Correlation with steady-state carrier lifetime

V. Mihailetchi, Marshall Wilson, P. Edelman, 2012 .

SPV Monitoring of Near Surface Doping – Role of Boron-Hydrogen Interaction; Boron Passivation and Reactivation

D. Marinskiy, J. Lagowski, 2001 .

Full wafer non-contact mapping of electrical properties of ultra-thin advanced dielectrics on Si

D. Marinskiy, Marshall Wilson, P. Edelman, 2002 .

Surface Photovoltage Measurement of Minority Carrier Diffusion Lengths Exceeding Wafer Thickness: Application to Iron Monitoring with Part Per Quadrillion Sensitivity

P. Edelman, J. Lagowski, A. Kontkiewicz, 1993 .

Evidence that blue luminescence of oxidized porous silicon originates from SiO2

A. Hoff, P. Sakthivel, S. Sen, 1994 .

Drift characteristics of mobile ions in SiNx films and solar cells

Dmitriy Marinskiy, Piotr Edelman, Marshall Wilson, 2015 .

Multifunction metrology platform for photovoltaics

R. Kopecek, K. Peter, J. D’Amico, 2011, 2011 37th IEEE Photovoltaic Specialists Conference.

COCOS (corona oxide characterization of semiconductor) non-contact metrology for gate dielectrics

Lubek Jastrzebski, Marshall Wilson, Alexandre Savtchouk, 2001 .

Non-contact deep level transient spectroscopy (DLTS) based on surface photovoltage

Piotr Edelman, A. Morawski, Jacek Lagowski, 1992 .

Energy levels of the SbGa heteroantisite defect in GaAs:Sb

A. Morawski, S. Sen, P. Edelman, 1993 .

QSS-μPCD measurement of lifetime in silicon wafers: advantages and new applications

V. Mihailetchi, R. Kopecek, Marshall Wilson, 2011 .

Unified Lifetime measurement for silicon PV

V. Mihailetchi, P. Edelman, J. Lagowski, 2012, 2012 38th IEEE Photovoltaic Specialists Conference.

Emitter passivation by charge injection

V. Mihailetchi, L. Jastrzebski, J. Lagowski, 2011, 2011 37th IEEE Photovoltaic Specialists Conference.

Non-contact C-V measurements of ultra thin dielectrics

D. Marinskiy, J. D’Amico, Marshall Wilson, 2004 .

Photoluminescence and minority carrier diffusion length imaging in silicon and GaAs

W. Henley, P. Edelman, J. Lagowski, 1992 .

A Novel Method For Studying Degradation Related To Plasma Processing Of Silicon Wafers

L. Jastrzebski, P. Edelman, J. Lagowski, 1996 .

Piezoelectric modulation of surface voltage in GaN and AlGaN/GaN: charge screening effects and 2DEG

Jacek Lagowski, Marshall Wilson, Alexandre Savtchouk, 2017, OPTO.

Non-Visual Defect Monitoring with Surface Voltage Mapping

D. Marinskiy, Marshall Wilson, P. Edelman, 2016 .

Photoluminescence Defect Diagnostics in Poly-Si Thin Films

S. Ostapenko, J. Lagowski, A. Savchuk, 1995 .

Band‐tail photoluminescence in polycrystalline silicon thin films

S. Ostapenko, L. Jastrzebski, J. Lagowski, 1995 .

Small signal AC-surface photovoltage technique for non-contact monitoring of near surface doping and recombination-generation in the depletion layer[Alternating Current]

D. Marinskiy, Marshall Wilson, J. Lagowski, 2000 .

Non‐Contact Electrical Doping Profiling

D. Marinskiy, J. D’Amico, L. Jastrzebski, 2003 .

Method for the measurement of long minority carrier diffusion lengths exceeding wafer thickness

L. Jastrzebski, P. Edelman, J. Lagowski, 1993 .

Porous Silicon Luminescence Study by Imaging Methods: Relationship to Pore Dimensions

T. Kowalewski, M. Wesołowski, P. Edelman, 1994 .

Infrared photoluminescence from Er doped porous Si

W. Henley, J. Siejka, J. Lagowski, 2000 .

SPIN-ON DOPING OF POROUS SILICON AND ITS EFFECT ON PHOTOLUMINESCENCE AND TRANSPORT CHARACTERISTICS

S. Sen, J. Siejka, J. Lagowski, 1997 .

Non-Contact, No Wafer Preparation Deep Level Transient Spectroscopy (DlTS) Based on Surface Photovoltage (SPV)

P. Edelman, J. Lagowski, M. Dexter, 1992 .

Non-Contact, Wafer-Scale Deep Level Transient Spectroscopy (DLTS) Based on Surface Photovoltage (SPV)

A. Morawski, P. Edelman, J. Lagowski, 1991 .

Single image concept for photoluminescence based emitter saturation current imaging using direct calibration by the QSS-μPCD method

Marshall Wilson, J. Lagowski, Z. Kovács, 2013, 2013 IEEE 39th Photovoltaic Specialists Conference (PVSC).

Unified Lifetime Metrology and Photoluminescence Imaging of Passivation Defects for Silicon PV

Piotr Edelman, Valentin D. Mihailetchi, Jacek Lagowski, 2013 .

Ferroelectric HfO2 thin film testing and whole wafer mapping with non‐contact corona‐Kelvin metrology

Johannes Müller, D. Marinskiy, Marshall Wilson, 2017 .

Non-Visual Defect Monitoring with Surface Voltage Mapping: Application for Semiconductor IC and PV Technology

D. Marinskiy, J. D’Amico, Marshall Wilson, 2015 .

New Approach to Surface Voltage Based Non-Visual Defect Inspection

D. Marinskiy, Marshall Wilson, P. Edelman, 2014 .

The Present Status and Recent Advancements in Corona-Kelvin Non-Contact Electrical Metrology of Dielectrics for IC-Manufacturing

D. Marinskiy, J. D’Amico, L. Jastrzebski, 2006, ECS Transactions.