S. Ohki

Ta Film Properties for X-Ray Mask Absorbers

M. Oda, A. Ozawa, S. Ohki, 1990 .

Improving X-Ray Mask Pattern Placement Accuracy by Correcting Process Distortion in Electron Beam Writing.

S. Uchiyama, M. Oda, A. Ozawa, 1995 .

Fabrication of x-ray mask from a diamond membrane and its evaluation

Y. Kubota, M. Oda, S. Ohki, 1998 .

Photoinduced Optical Changes in Amorphous Silicon-Carbon Alloy Prepared by Reactive Sputtering in an Atmosphere of Propane

S. Iida, S. Ohki, 1982 .

Cavernous undercuts appearing in reactive ion etched submicron-wide deep trenches

M. Oda, S. Ohki, H. Akiya, 1987 .

Ta/SiN-Structure X-Ray Masks for Sub-Half-Micron LSIs

Hideo Yoshihara, Akira Ozawa, Masatoshi Oda, 1989 .