Cornelis W. Hagen

Pattern transfer into silicon using sub-10 nm masks made by electron beam induced deposition

Andy Goodyear, Marijke Scotuzzi, Martin J. Kamerbeek, 2015, Advanced Lithography.

Model improvements to simulate charging in SEM

Thomas Klimpel, Cornelis W. Hagen, Kerim T. Arat, 2018, Advanced Lithography.

Size and shape control of sub-20 nm patterns fabricated using focused electron beam-induced processing

Cornelis W. Hagen, C. W. Hagen, Thomas Verduin, 2014 .

Determination of line edge roughness in low dose top-down scanning electron microscopy images

Pieter Kruit, Cornelis W. Hagen, Thomas Verduin, 2014, Advanced Lithography.

Direct fabrication of nanowires in an electron microscope

Cornelis W. Hagen, C. W. Hagen, Pieter Kruit, 2003 .

Deflection properties of an electrostatic electron lens with a shifted electrode

Cornelis W. Hagen, C. W. Hagen, Thomas Verduin, 2013 .

Limiting factors for electron beam lithography when using ultra-thin hydrogen silsesquioxane layers

Cornelis W. Hagen, Anda E. Grigorescu, Marco C. van der Krogt, 2007 .

Electron beam lithography on curved or tilted surfaces: Simulations and experiments

Cornelis W. Hagen, Kerim T. Arat, Ulrich Hofmann, 2019, Journal of Vacuum Science & Technology B.

Determination of line edge roughness in low-dose top-down scanning electron microscopy images

Cornelis W. Hagen, C. W. Hagen, Thomas Verduin, 2014 .