R. Zwijze

Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

M. Elwenspoek, G. Krijnen, M. Elwenspoek, 2000 .

Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

G. Krijnen, M. Elwenspoek, R. Wiegerink, 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

Quasi Monolithic Silicon Load Cell for Loads up to 1000 Insensitivity to Non-homogeneous Load Distributions

G. Krijnen, M. Elwenspoek, R. Wiegerink, 1999 .

Characterization of platinum lift off technique

J. Berenschot, H. Tong, G. Krijnen, 2000 .

High Capacity Silicon Load Cells

G. Krijnen, M. Elwenspoek, R. Wiegerink, 2001 .

First micromachined silicon load cell for loads up to 1000 kg

Meint J. de Boer, Remeo J. Wiegerink, Miko C. Elwenspoek, 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

High-force 10-kN piezoresistive silicon force sensor with output independent of force distribution

J. W. Berenschot, Meint J. de Boer, Remeo J. Wiegerink, 2000, SPIE MOEMS-MEMS.