M. Sansa

发表

Dual-mode NEMS self-oscillator for mass sensing

G. Sicard, S. Hentz, G. Jourdan, 2015, 2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum.

Frequency fluctuations in silicon nanoresonators

M. Roukes, É. Colinet, S. Hentz, 2015, Nature nanotechnology.

Optomechanical nanoresonator readout with optical downmixing

I. Favero, J. Fédéli, S. Hentz, 2016, 2016 IEEE International Frequency Control Symposium (IFCS).

50-kHz MEMS gyroscopes based on NEMS sensing with 1.3 mdps/√Hz ARW and 0.5°/h stability

G. Langfelder, P. Robert, T. Verdot, 2020, 2020 IEEE Sensors.

Massive manufacture and characterization of single-walled carbon nanotube field effect transistors

M. J. Esplandiu, Iñigo Martin-Fernandez, Philippe Godignon, 2010 .

Single-particle mass spectrometry with arrays of frequency-addressed nanomechanical resonators

M. Roukes, É. Colinet, C. Masselon, 2017, Nature Communications.

Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution.

J Verd, A. Uranga, N. Barniol, 2011, Lab on a chip.

Nanomechanical test structure for optimal alignment in stencil-based lithography

Arantxa Uranga, Julien Arcamone, Gabriel Abadal, 2009, 2009 IEEE International Conference on Microelectronic Test Structures.

Dynamic stencil lithography on full wafer scale

J. Brugger, V. Savu, M. V. D. Boogaart, 2008 .

Neutral mass spectrometry of virus capsids above 100 megadaltons with nanomechanical resonators

C. Masselon, S. Hentz, M. Defoort, 2018, Science.

Frequency fluctuations in silicon nanoresonators Supplementary Information

M. Roukes, É. Colinet, S. Hentz, 2016 .

Electrical transduction in nanomechanical resonators based on doubly clamped bottom-up silicon nanowires

F. Pérez-Murano, M. Fernández-Regúlez, Á. S. Paulo, 2012 .

Charge-independent mass spectrometry of single virus capsids above 100MDa with nanomechanical resonators

C. Masselon, S. Hentz, M. Defoort, 2018, 1804.02340.

Ampacity and electrical properties of thermally treated ultrathin carbon membranes grown by focused ion beam induced deposition of phenanthrane

N. Mestres, G. Rius, F. Pérez-Murano, 2014, 2014 IEEE International Nanoelectronics Conference (INEC).

Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries

F. Pérez-Murano, M. Lorenzoni, X. Borrisé, 2015 .

Bottom-up silicon nanowire resonators for nanomechanical sensing: Controlled fabrication technology and high-sensitivity frequency modulation transduction

M. Serra-Garcia, F. Pérez-Murano, M. Fernández-Regúlez, 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

Frequency fl uctuations in silicon nanoresonators

M. Roukes, É. Colinet, S. Hentz, 2016 .

Single-particle mass spectrometry with arrays of frequency-addressed nanomechanical resonators

M. Roukes, É. Colinet, C. Masselon, 2017, Nature Communications.

Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM

F. Pérez-Murano, M. Lorenzoni, J. Fraxedas, 2016 .

Resonant Accelerometers Based on Nanomechanical Piezoresistive Transduction

G. Langfelder, P. Robert, J. Arcamone, 2021, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS).

High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators

Jordi Llobet, Francesc Pérez-Murano, Marc Sansa, 2014, Nature Communications.

Optomechanical mass spectrometry

I. Favero, C. Masselon, S. Hentz, 2020, Nature Communications.

A test vehicle and a two step procedure to evaluate a massive number of single-walled carbon nanotube field effect transistors

P. Godignon, F. Pérez-Murano, E. Lora-Tamayo, 2010, 2010 International Conference on Microelectronic Test Structures (ICMTS).

Horizontally patterned Si nanowire growth for nanomechanical devices

J. Tamayo, M. Serra-Garcia, F. Pérez-Murano, 2013, Nanotechnology.

Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography.

Arantxa Uranga, Núria Barniol, Julien Arcamone, 2008, Small.

1.3 mm2 Nav-Grade NEMS-Based Gyroscope

G. Langfelder, P. Robert, M. Sansa, 2021, Journal of Microelectromechanical Systems.

Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation

N. Mestres, J. Arbiol, F. Pérez-Murano, 2014, Nanotechnology.

Fabrication of functional electromechanical nanowire resonators by focused ion beam implantation

Xavier Borrisé, Jordi Llobet, Marc Sansa, 2015 .

Fabrication of functional electromechanical nanowire resonators by focused ion-beam (FIB) implantation

J. Llobet, M. Sansa, X. Borrisé, 2015, Advanced Lithography.

High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators

F. Pérez-Murano, M. Fernández-Regúlez, Á. San Paulo, 2014, Nature Communications.

Frequency fluctuations in mono- and polysilicon resonators: A new limit of detection

T. Ernst, S. Hentz, M. Gely, 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Real time sensing in the non linear regime of nems resonators

C. Lamarque, R. Dufour, S. Hentz, 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).

Compact heterodyne NEMS oscillator for sensing applications

Gilles Sicard, Sebastien Hentz, Guillaume Jourdan, 2015, 2015 45th European Solid State Device Research Conference (ESSDERC).

Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction

Núria Barniol, Francesc Pérez-Murano, Marc Sansa, 2015, Sensors.

Real-Time Sensing with Multiplexed Optomechanical Resonators.

I. Favero, S. Hentz, M. Gely, 2021, Nano letters.

Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution

Núria Barniol, Jordi Llobet, Francesc Torres, 2015, Nanotechnology.