R. Siergiej

Investigating thin film stresses in stacked silicon dioxide/silicon nitride structures and quantifying their effects on frequency response

A. Kingon, G. Buckner, J. Maranchi, 2007 .

Effects of adhesion layers on the ferroelectric properties of lead zirconium titanate thin films deposited on silicon nitride coated silicon substrates

A. Kingon, G. Buckner, J. Maranchi, 2008 .