C.R. Perez

Dual-Beam Actuation of Piezoelectric AlN RF MEMS Switches Monolithically Integrated with AlN Contour-Mode Resonators

M. Pisani, R. Mahameed, N. Sinha, 2008 .

Hybrid Ultra-Compact 4th Order Band-Pass Filters Based On Piezoelectric AlN Contour-Mode MEMS Resonators

M. Pisani, R. Mahameed, N. Sinha, 2008 .