M. Oliva

High performance diffraction gratings made by e-beam lithography

E. Kley, D. Michaelis, U. Zeitner, 2011 .

Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling

P. Bøggild, D. H. Petersen, T. Harzendorf, 2013, Nanotechnology.

High efficiency blazed gratings in resonance domain

M. Oliva, 2015 .

Optical design including characteristics of manufactured nanostructures

Dirk Michaelis, Maria Oliva, Christoph Wächter, 2013, Optics & Photonics - Optical Engineering + Applications.