J. Sullivan

发表

Low temperature plasma-assisted chemical vapor deposition of tantalum nitride from tantalum pentabromide for copper metallization

H. Frisch, A. Kaloyeros, Barry Arkles, 1999 .

Low-temperature chemical vapor deposition of tantalum nitride from tantalum pentabromide for integrated circuitry copper metallization applications

G. G. Peterson, H. Frisch, A. Kaloyeros, 1999 .

Initial Processes in CO2 Glow Discharges

R. Buser, J. Sullivan, 1970 .

Tantalum Nitride Films Grown by Inorganic Low Temperature Thermal Chemical Vapor Deposition Diffusion Barrier Properties in Copper Metallization

G. G. Peterson, H. Frisch, A. Kaloyeros, 1999 .

Developments in equipment support technology

J. Hosch, Y. Gu, J. Sullivan, 1998 .

ChemInform Abstract: Interlayer Mediated Epitaxy of Cobalt Silicide on Silicon (100) from Low Temperature Chemical Vapor Deposition of Cobalt.

A. Kaloyeros, Guillermo M. Nuesca, G. Peterson, 2001 .

Interlayer Mediated Epitaxy of Cobalt Silicide on Silicon (100) from Low Temperature Chemical Vapor Deposition of Cobalt Formation Mechanisms and Associated Properties

A. Kaloyeros, Guillermo M. Nuesca, Barry Arkles, 2001 .

The Effects of Processing Parameters in the Chemical Vapor Deposition of Cobalt from Cobalt Tricarbonyl Nitrosyl

A. Kaloyeros, Guillermo M. Nuesca, Barry Arkles, 1999 .

Metalorganic chemical vapor deposition of titanium oxide for microelectronics applications

G. G. Peterson, E. Eisenbraun, A. Kaloyeros, 2001 .

The effect of MoW interlayer thickness on diamond growth on steel substrates

V. Kundŕat, Xiaoling Zhang, H. Ye, 2020, Journal of Materials Research.

Profile simulation of conformality of chemical vapor deposited copper in subquarter-micron trench and via structures

James F. Loan, E. Eisenbraun, A. Kaloyeros, 1997 .

Development of variable capacitance pressure transducers for vacuum applications

J. Sullivan, 1985 .

Low-temperature metalorganic chemical vapor deposition of Al_2O_3 for advanced complementary metal-oxide semiconductor gate dielectric applications

E. Eisenbraun, A. Kaloyeros, S. Skordas, 2003 .

Late Pleistocene megafauna site at Black Creek Swamp, Flinders Chase National Park, Kangaroo Island, South Australia

E. Rhodes, N. Spooner, S. Eggins, 2006 .

Pressure bursts in bakeable ultra-high vacuum valves during opening and closing

R. Buser, J. Sullivan, 1966 .

CVD of Tantalum Oxide Dielectric Thin Films for Nanoscale Device Applications

H. Frisch, E. Eisenbraun, A. Kaloyeros, 2004 .

Mass flow measurement and control of low vapor pressure sources

J. Sullivan, R. Jacobs, S. Schaffer, 1989 .

Application of Margin Rules to Tender Offers by Foreign Investors

J. Sullivan, 1982 .

Influence of Magnetic Fields upon Gas Discharge Lasers

R. Buser, J. Sullivan, J. Kainz, 1963 .

A feasibility study of a rocket-powered hypersonic wind tunnel

John Joseph Sullivan, J. Sullivan, 1955 .

Low temperature inorganic chemical vapor deposition of Ti-Si-N diffusion barrier liners for gigascale copper interconnect applications

E. Eisenbraun, A. Kaloyeros, D. Anjum, 2000 .

In situ quadrupole mass spectroscopy studies of water and solvent coordination to copper(II) β-diketonate precursors: implications for the chemical vapor deposition of copper

James F. Loan, E. Eisenbraun, A. Kaloyeros, 1995 .

Chemical vapor deposition of copper from CuI hexafluoroacetylacetonate trimethylvinylsilane for ultralarge scale integration applications

James F. Loan, A. Kaloyeros, D. Manger, 1996 .