G. Hebner

发表

Ion and neutral species in C2F6 and CHF3 dielectric etch discharges

R. Jayaraman, R. Mcgrath, G. Hebner, 1999 .

Radiofrequency sheath fields above a metal-dielectric interface

E. Barnat, G. Hebner, 2004 .

Surface dependent electron and negative ion density in SF6/argon gas mixtures

G. Hebner, I. C. Abraham, 2002 .

Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge

E. Barnat, A. Paterson, G. Hebner, 2007 .

Electric field profiles around an electrical probe immersed in a plasma

E. Barnat, G. Hebner, 2007 .

Gas temperature dependent output of the atomic argon and xenon lasers

G. Hebner, 1995 .

Characterization of pulse-modulated inductively coupled plasmas in argon and chlorine

C. Fleddermann, G. Hebner, 1997 .

Fission‐fragment excited xenon/rare gas mixtures. II. Small signal gain of the 2.03 μm xenon transition

Gregory A. Hebner, G. N. Hays, G. Hebner, 1993 .

Fission-fragment excitation of the high-pressure atomic neon laser at 703. 2 and 724. 5 nm

G. Hebner, 1993 .

Temperature dependent gain of the atomic xenon laser

M. Kushner, G. Hebner, J. Shon, 1993 .

Measured pressure broadening and shift rates of the 1.73 μm (5d[3/2]1–6p[5/2]2) transition of xenon

G. Hebner, G. Hays, 1991 .

Predictions for gain in the fission‐fragment‐excited atomic xenon laser

M. Kushner, G. Hebner, J. Shon, 1993 .

1.27 mu m atomic argon laser parameters in fission-fragment excited He/Ar and He/Ne/Ar gas mixtures

G. Hebner, G. Hays, 1993 .

Growth of InSb on GaAs by metalorganic chemical vapor deposition

R. M. Biefeld, G. Hebner, 1991 .

Epitaxial growth of InSb on GaAs by metalorganic chemical vapor deposition {au}R. M. ,Biefeld and

G. Hebner, 1990 .

Spatially resolved CF, CF2, SiF and SiF2 densities in fluorocarbon containing inductively driven discharges

G. Hebner, 2002 .

CF, CF2 and SiF densities in inductively driven discharges

G. Hebner, 2000 .

Ion temperature and velocity in a 300 mm diameter capacitively coupled plasma reactor driven at 13, 60 and 162 MHz

A. Paterson, G. Hebner, A. M. Paterson, 2010 .

Charged Species Dynamics in an Inductively Coupled Ar/SF6 Plasma

S. Rauf, P. Ventzek, J. Woodworth, 2001 .

In situ measurement of the metalorganic and hydride partial pressures in a MOCVD reactor using ultraviolet absorption spectroscopy

R. M. Biefeld, K. Killeen, G. Hebner, 1989 .

Plasma nonuniformities induced by dissimilar electrode metals

E. Barnat, G. Hebner, 2005 .

Surface dependent electron and negative ion density in inductively coupled discharges

T. W. Hamilton, G. Hebner, M. Blain, 1999 .

Negative ion densities in chlorine- and boron trichloride-containing inductively coupled plasmas

C. Fleddermann, G. Hebner, 1997 .

Characterization of pulse-modulated inductively coupled discharges in argon and chlorine

C. Fleddermann, G. Hebner, 1997, IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science.

DIODE LASER SPECTROSCOPY OF HIGH DENSITY FLUOROCARBON PLASMAS FOR SEMICONDUCTOR MATERIAL PROCESSING

H. Anderson, G. Hebner, G. Deering, 1998 .

Behavior of excited argon atoms in inductively driven plasmas

G. Hebner, P. Miller, 2000 .

Relative atomic chlorine density in inductively coupled plasmas containing chlorine and boron trichloride

C. Fleddermann, G. Hebner, 1998 .

Relative atomic chlorine density in inductively coupled chlorine plasmas

G. Hebner, 1997 .

Negative ion densities in NF3 discharges

K. E. Greenberg, J. Verdeyen, G. Hebner, 1984 .

Characterization of electron and negative ion densities in fluorocarbon containing inductively driven plasmas

G. Hebner, I. C. Abraham, 2001 .

Electron and Negative Ion Densities in C(2)F(6) and CHF(3) Containing Inductively Coupled Discharges

G. Hebner, P. Miller, 2000 .

Self-consistent three-dimensional model of dust particle transport and formation of Coulomb crystals in plasma processing reactors

Vivek M. Vyas, M. Kushner, G. Hebner, 2002 .

Direct determination of particle-particle interactions in a 2D plasma dust crystal.

R. Buss, P. Ho, G. Hebner, 2001, Physical review letters.

Decay of the electron number density in the nitrogen afterglow using a hairpin resonator probe

B. Ganguly, N. Siefert, G. Hebner, 2006 .

An Inductively Coupled Plasma Source for the Gaseous Electronics Conference RF Reference Cell

Gregory A. Hebner, Paul A. Miller, K. E. Greenberg, 1995, Journal of research of the National Institute of Standards and Technology.

The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges

David B. Graves, Mark A. Sobolewski, James K. Olthoff, 1994 .

Spatially resolved SiF and SiF2 densities in inductively driven discharges containing C2F6 and C4F8

G. Hebner, 2001 .

Negative ion density in inductively coupled chlorine plasmas

G. Hebner, 1995 .

Electron and metastable densities in parallel-plate radio-frequency discharges

K. E. Greenberg, G. Hebner, 1993 .

METASTABLE CHLORINE ION KINETICS IN INDUCTIVELY COUPLED PLASMAS

C. Fleddermann, G. Hebner, P. Miller, 1997 .

Electric fields in a sheath near a metal–dielectric interface

E. Barnat, G. Hebner, 2004 .

Optical Diagnostics in the Gaseous Electronics Conference Reference Cell

K. E. Greenberg, G. Hebner, 1995, Journal of research of the National Institute of Standards and Technology.

Electric fields in high‐frequency parallel‐plate helium discharges

K. E. Greenberg, G. Hebner, M. Riley, 1994 .

An experimental study of a parallel‐plate radio‐frequency discharge: Measurements of the radiation temperature and electron density

M. Kushner, J. Verdeyen, G. Hebner, 1988 .

Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas

Gregory A. Hebner, G. Hebner, 1996 .

Measurement of atomic indium during metalorganic chemical vapor deposition

K. Killeen, G. Hebner, 1990 .

Analysis of the particle interactions in a two-dimensional-plasma dust crystal and the use of dust as a probe of the time-averaged presheath electric field.

K. E. Greenberg, G. Hebner, M. Riley, 2002, Physical review. E, Statistical, nonlinear, and soft matter physics.

Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge

U. Czarnetzki, D. Luggenhölscher, G. Hebner, 1999 .

Frequency dependent plasma characteristics in a capacitively coupled 300 mm wafer plasma processing chamber

E. Barnat, A. Paterson, G. Hebner, 2006 .

Theoretical and experimental study of low‐temperature, capacitively coupled, radio‐frequency helium plasmas

Gregory A. Hebner, K. E. Greenberg, G. Hebner, 1994 .

Spatial and frequency dependence of plasma currents in a 300 mm capacitively coupled plasma reactor

E. Barnat, A. Paterson, G. Hebner, 2006 .

Optical self-absorption technique for qualitative measurement of excited-state densities in plasma reactors

G. Hebner, Tom Ni, P. Miller, 1998 .

Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges

E. Barnat, A. Paterson, G. Hebner, 2007 .

METASTABLE CHLORINE ION TEMPERATURE AND DRIFT VELOCITY IN AN INDUCTIVELY COUPLED PLASMA

G. Hebner, 1996 .

Ion energy and angular distributions in inductively driven radio frequency discharges in chlorine

T. W. Hamilton, J. Woodworth, G. Hebner, 1997 .

Radio frequency sheath formation and excitation around a stepped electrode

E. Barnat, G. Hebner, 2005 .

Measurements of relative BCl density in BCl3-containing inductively coupled radio frequency plasmas

C. Fleddermann, G. Hebner, 1998 .

Direct simulation Monte Carlo of inductively coupled plasma and comparison with experiments

D. J. Economou, T. Bartel, J. Woodworth, 1997 .

Reactor pumped laser research at the Sandia National Laboratories pulsed reactor facilities

D. A. McArthur, P. S. Pickard, D. R. Neal, 1994 .

Fission‐fragment‐excited lasing at 585.3 nm in He/Ne/Ar gas mixtures

Gregory A. Hebner, G. N. Hays, G. Hebner, 1990 .

ASCR Report on a Quantum Computing Testbed for Science

David Dean, Jonathan Carter, Peter Maunz, 2017 .

Electric‐field measurements in 13.56 MHz helium discharges

K. E. Greenberg, G. Hebner, 1993 .

Overview of Plasma Diagnostic Techniques

J. Woodworth, G. Hebner, P. A. Miller, 2000 .

Model for Resonant Plasma Probe

L. Warne, W. Johnson, R. Jorgenson, 2007 .

The Spatial and Temporal Evolution of the Glow in an RF Discharge

G. Hebner, And J. T. Verdeyen, 1986, IEEE Transactions on Plasma Science.