Dirk Rudloff

DUV-reflective coatings and novel actuator materials for light modulator arrays: Presentation held at the Photonics West Conference 2006, 21 - 26 January 2006, San Jose, California

Hubert Lakner, Thilo Sandner, Alexandre Gatto, 2006 .

Advances in SLM development for microlithography

Michael Wagner, Michael Müller, Jan-Uwe Schmidt, 2009, MOEMS-MEMS.

Multispectral characterization of diffractive micromirror arrays

Hubert Lakner, Jan-Uwe Schmidt, Martin Friedrichs, 2010, Photonics Europe.

High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

Fredrik Jonsson, Peter Duerr, Ingo Wullinger, 2014, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates

Thor Bakke, Hubert Lakner, Jan-Uwe Schmidt, 2008, SPIE Photonics Europe.

Calibration of diffractive micromirror arrays for microscopy applications

Hubert Lakner, Michael Wagner, Jan-Uwe Schmidt, 2011, Applied Optics and Photonics China.

Temperature measurement on MOEMS micromirror plates under illumination

Detlef Kunze, Dirk Rudloff, Ulrike Dauderstädt, 2010, MOEMS-MEMS.

Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding

Harald Schenk, Thor Bakke, Hubert Lakner, 2006, SPIE MOEMS-MEMS.

Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators

Christoph Hohle, Martin Friedrichs, Dirk Rudloff, 2021, OPTO.