T. Momose

发表

One-Step Fabrication of Copper Thin Films on Insulators Using Supercritical Fluid Deposition

E. Kondoh, Y. Shimogaki, M. Sugiyama, 2013 .

Kinetic analysis of face-centered-cubic Ti1−Al N film deposition by chemical vapor deposition

Y. Shimogaki, Junichiro Yamaguchi, T. Momose, 2021 .

Experimental approach to estimate diffusivity of metal organics in supercritical CO2 at high temperatures

Y. Shimogaki, Y. Shimoyama, T. Momose, 2017 .

Surface Modification of SiO2 Microchannels with Biocompatible Polymer Using Supercritical Carbon Dioxide

K. Ishihara, Y. Shimogaki, M. Takai, 2010 .

Hot-Wire-Assisted Atomic Layer Deposition of High-Quality Ru Thin Films in the Absence of Oxidization

Y. Shimogaki, T. Momose, Guangjie Yuan, 2020 .

Supercritical fluid deposition technique enabling metallic coating onto 3D-printed polymer for fabrication of high-aspect-ratio THz devices

Y. Shimogaki, K. Konishi, M. Kuwata-Gonokami, 2020, 2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz).

Strain control of GaN grown on Si substrates using an AlGaN interlayer

Y. Shimogaki, Y. Nakano, M. Sugiyama, 2019, Journal of Crystal Growth.

Fabrication of Ni mold for nanoimprint lithography by combining two supercritical fluid-based deposition technologies

Y. Shimogaki, T. Momose, Hiroto Kawada, 2015 .

Kinetic Analysis of GaN-MOVPE via Thickness Profiles in the Gas Flow Direction with Systematically Varied Growth Conditions

Y. Shimogaki, C. Cavallotti, M. Sugiyama, 2016 .

Growth mechanism of hot wire-assisted atomic layer deposition of nickel to achieve conformal deposition on trenches: role of physisorption and chemisorption

Y. Shimogaki, T. Momose, Guangjie Yuan, 2019, Japanese Journal of Applied Physics.

Role of NH3 feeding period to realize high-quality nickel films by hot-wire-assisted atomic layer deposition

Y. Shimogaki, T. Momose, Guangjie Yuan, 2014 .

CVD and ALD Co(W) Films Using Amidinato Precursors as a Single-Layered Barrier/Liner for Next-Generation Cu-Interconnects

Y. Shimogaki, T. Nogami, T. Momose, 2013 .

Potential Step Coverage for Supercritical Fluid Deposition of TiO2 by Numerical Simulation and Microcavity Analysis

Y. Shimogaki, Kyubong Jung, T. Momose, 2013 .

Strontium ruthenium oxide deposition in supercritical carbon dioxide using a closed reactor system

Y. Shimogaki, Kyubong Jung, T. Momose, 2013 .

Study on the Adhesion Strength of CVD-Cu Films with ALD-Co(W) Underlayers Made Using Amidinato Precursors

Y. Shimogaki, T. Momose, K. Shima, 2015 .

Atomic Layer Deposited Co(W) Film as a Single-Layered Barrier/Liner for Next-Generation Cu-Interconnects

Y. Shimogaki, T. Momose, H. Shimizu, 2012 .

Comparative Study on Cu-CVD Nucleation Using β-diketonato and Amidinato Precursors for Sub-10-nm-Thick Continuous Film Growth

Y. Shimogaki, T. Momose, K. Shima, 2015 .

Role of W and Mn for reliable 1X nanometer-node ultra-large-scale integration Cu interconnects proved by atom probe tomography

Y. Shimogaki, Y. Shimizu, Koji Inoue, 2014 .

Solubility of bis-(2,2,6,6-tetramethyl-3,5-heptanedionato)copper(II) in mixed supercritical CO2 and H2 systems for application in supercritical fluid deposition of Cu

H. Uchida, Y. Shimogaki, M. Sugiyama, 2015 .

Fundamental Evaluation of Gas-Phase Elementary Reaction Models for Silicon Carbide Chemical Vapor Deposition

N. Sato, Y. Shimogaki, Y. Fukushima, 2017 .

Conformal Bismuth Titanate Formation Using Supercritical Fluid Deposition

Y. Shimogaki, Y. Shimoyama, Kyubong Jung, 2017 .

Step Coverage Quality of Cu Films by Supercritical Fluid Deposition Compared with Chemical Vapor Deposition

E. Kondoh, Y. Shimogaki, M. Sugiyama, 2010 .

Effect of liquid additives in supercritical fluid deposition of copper for enhancing deposition chemistry

Y. Shimogaki, M. Sugiyama, T. Momose, 2008 .

A 50 nm-wide 5 μm-deep copper vertical gap formation method by a gap-narrowing post-process with Supercritical Fluid Deposition for Pirani gauge operating over atmospheric pressure

Y. Mita, Y. Shimogaki, Y. Nakano, 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

Kinetic effects of methanol addition on supercritical fluid deposition of TiO2

Y. Shimogaki, Y. Shimoyama, Kyubong Jung, 2018, The Journal of Supercritical Fluids.

Development of a model for evaluating propagation loss of metal-coated dielectric terahertz waveguides

Y. Shimogaki, K. Konishi, M. Kuwata-Gonokami, 2021, Journal of Applied Physics.

Kinetic study of alcohol-assisted supercritical fluid deposition of TiO2

Y. Shimogaki, Kyubong Jung, T. Momose, 2014 .

Smooth and Conformal TiO2 Thin-Film Formation Using Supercritical Fluid Deposition

Y. Shimogaki, Kyubong Jung, T. Momose, 2013 .

Conformal and Stoichiometric Chemical Vapor Deposition of Silicon Carbide onto Ultradeep Heterogeneous Micropores by Controlling the Initial Nucleation Stage.

N. Sato, Y. Shimogaki, Y. Fukushima, 2021, ACS applied materials & interfaces.

Design of a Multi-Wafer Reactor for Supercritical Fluid Deposition of Cu in Mass Production: (1) Reaction Mechanism and Kinetics

E. Kondoh, Y. Shimogaki, M. Sugiyama, 2014 .

High‐Aspect‐Ratio Parallel‐Plate Microchannels Applicable to Kinetic Analysis of Chemical Vapor Deposition

N. Sato, Y. Shimogaki, Y. Fukushima, 2016 .

Modeling of the elementary gas‐phase reaction during chemical vapor deposition of silicon carbide from CH 3 SiCl 3 /H 2

N. Sato, Y. Shimogaki, M. Koshi, 2020 .

Separate evaluation of multiple film-forming species in chemical vapor deposition of SiC using high aspect-ratio microchannels

N. Sato, Y. Shimogaki, Y. Fukushima, 2017 .

Porous Membranes as Sacrificial Layers Enabling Conformal Chemical Vapor Deposition Involving Multiple Film-Forming Species.

N. Sato, Y. Shimogaki, Y. Fukushima, 2020, ACS applied materials & interfaces.

Kinetic study on heterogeneous nucleation and incubation period during chemical vapor deposition.

N. Sato, Y. Shimogaki, Y. Fukushima, 2023, The Journal of chemical physics.

Identification of Film-Forming Species during SiC-CVD of CH3SiCl3/H2 by Exploiting Deep Microtrenches

N. Sato, Y. Shimogaki, Y. Fukushima, 2019, ECS Journal of Solid State Science and Technology.

Self-Assembled Nano-Stuffing Structure in CVD and ALD Co(W) Films as a Single-Layered Barrier/Liner for Future Cu-Interconnects

Y. Shimogaki, T. Nogami, T. Momose, 2013 .

Precursor-based designs of nano-structures and their processing for Co(W) alloy films as a single layered barrier/liner layer in future Cu-interconnect

Hideharu Shimizu, Takeshi Momose, Kohei Shima, 2015 .

Ultra-Conformal Metal Coating on High-Aspect-Ratio Three-Dimensional Structures Using Supercritical Fluid: Controlled Selectivity/Non-Selectivity

Y. Shimogaki, M. Sugiyama, T. Uejima, 2012 .

Elementary gas‐phase reactions of radical species during chemical vapor deposition of silicon carbide using CH 3 SiCl 3

N. Sato, Y. Shimogaki, M. Koshi, 2021 .

Acetone-assisted deposition of silver films in supercritical carbon dioxide

Y. Shimogaki, Bin Zhao, T. Momose, 2008 .

Analysis of the Gas Phase Kinetics Active during GaN Deposition from NH3 and Ga(CH3)3.

Y. Shimogaki, C. Cavallotti, K. Fujii, 2015, The journal of physical chemistry. A.

Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation

Y. Shimogaki, M. Koshi, T. Momose, 2012 .

Multi-Scale Analysis and Elementary Reaction Simulation of SiC-CVD Using CH3SiCl3/H2 I. Effect of Reaction Temperature

N. Sato, Y. Shimogaki, Y. Fukushima, 2013 .

Suitability of metallic materials for constructing metal-coated dielectric terahertz waveguides

Y. Shimogaki, K. Konishi, M. Kuwata-Gonokami, 2022, Journal of Applied Physics.

Fabrication of three-dimensional CuInS2 solar-cell structure via supercritical fluid processing

L. Sang, I. Honma, Y. Nakayasu, 2017 .

Drop-in test structure chip to visualize residual stress of Ru/Cu film grown by atomic layer deposition and supercritical fluid deposition

Y. Mita, A. Higo, T. Momose, 2020, 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS).

Supercritical Fluid Deposition (SCFD) Technique as a Novel Tool for MEMS Fabrication

Y. Shimogaki, M. Sugiyama, T. Saito, 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

Kinetic study on hot-wire-assisted atomic layer deposition of nickel thin films

Y. Shimogaki, T. Momose, Guangjie Yuan, 2014 .

In Situ Observation of Initial Nucleation and Growth of Chemical Vapor Deposition of Copper by Surface Reflectivity Measurement

Y. Shimogaki, T. Momose, 2006 .

Design of a Multi-Wafer Reactor for Supercritical Fluid Deposition of Cu in Mass Production: (2) Benchmarks for Single- and Multiple-Wafer Reactors

E. Kondoh, Y. Shimogaki, M. Sugiyama, 2014 .