F. Zimmer

CMOS-Integrable Piston-Type Micro-Mirror Array for Adaptive Optics Made of Mono-Crystalline Silicon using 3-D Integration

G. Stemme, F. Niklaus, A. Gehner, 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

Single-detector micro-electro-mechanical scanning grating spectrometer

H. Schenk, W. Scherf, T. Sandner, 2006, Analytical and bioanalytical chemistry.

CMOS-INTEGRABLEPISTON-TYPEMICRO-MIRRORARRAY FOR ADAPTIVEOPTICSMADE OFMONO-CRYSTALLINESILICON USING3-DINTEGRATION

A. Gehner, M. Lapisa, F. Zimmer, 2009 .

Heterogeneous 3D integration of hidden hinge micromirror arrays consisting of two layers of monocrystalline silicon

Göran Stemme, Frank Niklaus, Andreas Gehner, 2013 .

Drift-Free Micromirror Arrays Made of Monocrystalline Silicon for Adaptive Optics Applications

A. Gehner, G. Stemme, F. Zimmer, 2012, Journal of Microelectromechanical Systems.

One-Megapixel Monocrystalline-Silicon Micromirror Array on CMOS Driving Electronics Manufactured With Very Large-Scale Heterogeneous Integration

G. Stemme, F. Niklaus, M. Bring, 2011, Journal of Microelectromechanical Systems.

Very large scale heterogeneous system integration for 1-megapixel mono-crystalline silicon micro-mirror array on CMOS driving electronics

G. Stemme, F. Zimmer, M. Bring, 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

Wafer bonding with nano-imprint resists as sacrificial adhesive for fabrication of silicon-on-integrated-circuit (SOIC) wafers in 3D integration of MEMS and ICs

Göran Stemme, Niclas Roxhed, Fredrik Forsberg, 2009 .