D. Haefliger

发表

Processing of thin SU-8 films

A. Boisen, S. Keller, G. Blagoi, 2008 .

Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water

A. Stemmer, B. Cahill, D. Haefliger, 2003 .

Optimized plasma-deposited fluorocarbon coating for dry release and passivation of thin SU-8 cantilevers

Anja Boisen, Stephan Sylvest Keller, Daniel Haefliger, 2007 .

Autonomous valve for detection of biopolymer degradation

O. Geschke, A. Boisen, D. Haefliger, 2009, 2009 IEEE Sensors.

Contact printed masks for 3D microfabrication in negative resists

A. Boisen, D. Haefliger, 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..

Rapid molecular detection of food- and waterborne diseases

A. Boisen, S. Keller, M. Nordström, 2008 .

Fabrication of thin SU-8 cantilevers: initial bending, release and time stability

A. Boisen, S. Keller, D. Haefliger, 2010 .

Fabrication of near‐field optical apertures in aluminium by a highly selective corrosion process in the evanescent field

A. Stemmer, D. Haefliger, 2003, Journal of microscopy.

Three-dimensional microfabrication in negative resist using printed masks

Anja Boisen, Daniel Haefliger, A. Boisen, 2006 .

Structuring of aluminum films by laser-induced local oxidation in water

A. Stemmer, A. Stemmer, D. Haefliger, 2002 .

Writing subwavelength-sized structures into aluminium films by thermo-chemical aperture-less near-field optical microscopy.

A. Stemmer, D. Haefliger, 2004, Ultramicroscopy.

SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

Anja Boisen, Alicia Johansson, Maria Nordström, 2008, Sensors.

An integrated piezo-acoustic shear-force distance sensor with nanometer resolution for a micropipette tool

Georg Schitter, Andreas Stemmer, Marc Muenchinger, 2003 .

Contrast and scattering efficiency of scattering-type near-field optical probes

J. Plitzko, R. Hillenbrand, D. Haefliger, 2004 .

Dry release of all-polymer structures

Anja Boisen, Maria Nordström, Peter Rasmussen, 2005 .

Self‐Positioning of Polymer Membranes Driven by Thermomechanically Induced Plastic Deformation

Anja Boisen, Ole Hansen, Daniel Haefliger, 2006 .

Subwavelength-sized aperture fabrication in aluminum by a self-terminated corrosion process in the evanescent field

A. Stemmer, D. Haefliger, 2002 .

Self-actuated polymeric valve for autonomous sensing and mixing

A. Boisen, A. Boisen, R. Marie, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..