P. Ekkels

Evaluation of platinum as a structural thin film material for RF-MEMS devices

R. Puers, H. Tilmans, H. Tilmans, 2009 .

Generic RF-MEMS technology platform for mobile and satellite communications

Anne Jourdain, Kristof Vaesen, Bart Nauwelaers, 2005 .

Fabrication of functional structures on thin silicon nitride membranes

J. Berenschot, J. Brugger, G. Krijnen, 2003 .

A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators

W. De Raedt, P. Ekkels, I. Huynen, 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).

Effect of substrate charging on the reliability of capacitive RF MEMS switches

Robert Puers, Xavier Rottenberg, Philippe Soussan, 2009 .