Haifei Bao

Monolithic tri-axis cantilever high-shock accelerometers fabricated with a single-sided process in (111) wafers

Jiachou Wang, Xinxin Li, H. Zou, 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Monolithically integrated tri-axis shock accelerometers with MHz-level high resonant-frequency

Jiachou Wang, Xinxin Li, Zhaohui Song, 2017 .

Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer

Jiachou Wang, Xinxin Li, Zhaohui Song, 2019, Micromachines.

MEMS monolithic tri-axis high-shock accelerometers with MHz-level ultra-high resonant frequency

Jiachou Wang, Xinxin Li, H. Zou, 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).

Single-wafer-processed nano-positioning XY-stages with trench-sidewall micromachining technology

Bin Liu, Haifei Bao, Lei Gu, 2006 .

Friction and Wear Properties of Microstructures in MEMS

Yuelin Wang, Weiyuan Wang, B. Xiong, 2001 .

A silicon integrated micro nano-positioning XY-stage for nano-manipulation

Weibin Rong, Xinxin Li, Lining Sun, 2008 .

A heater-integrated scanning probe microscopy probe array with different tip radii for study of micro-nanosize effects on silicon-tip/polymer-film friction.

Xinxin Li, Haifei Bao, 2008, The Review of scientific instruments.

Friction and wear properties in MEMS

Minhang Bao, Bin Xiong, Haifei Bao, 2002 .

AFM probes fabricated with masked–maskless combined anisotropic etching and p+ surface doping

Xinxin Li, Yuelin Wang, F. Feng, 2006 .

High-performance monolithic triaxial piezoresistive shock accelerometers

Songlin Feng, Xinxin Li, Heng Yang, 2008 .