A. Goehlich

发表

Fabrication and electrochemical characterization of ruthenium nanoelectrodes

H. Vogt, Sonja Allani, A. Jupe, 2017 .

Diagnostics of atoms by laser spectroscopic methods

A. Goehlich, H. Döbele, 2016 .

Thomson scattering diagnostics of an argon arc plasma and spectral resolution of the ion feature with a narrow bandwidth dye laser

V. S. Gathen, A. Goehlich, H. Döbele, 1991 .

ALD-based 3D-capacitors for harsh environments

H. Vogt, A. Goehlich, Y. Çelik, 2016, 2016 12th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME).

High-Temperature Trench Capacitors, Using Thin-Film ALD Dielectrics

H. Kappert, H. Vogt, A. Goehlich, 2015 .

Development of a Piezoelectric Flexural Plate-Wave (FPW) Biomems-Sensor for Rapid Point-of-Care Diagnostics

H. Kappert, M. Goertz, H. Vogt, 2018 .

Tapering of nanoelectrodes for an intracellular contact via a double hard mask technique

H. Vogt, Sonja Allani, A. Jupe, 2017, 2017 13th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME).

D4.3 - Development of an Universial Allergen Sensor System

H. Vogt, A. Goehlich, Y. Çelik, 2013 .

Diagnostics of atoms by laser spectroscopic methods in plasmas and plasma-wall interaction studies (vacuum ultraviolet and two-photon techniques)

U. Czarnetzki, A. Goehlich, H. Döbele, 2000 .

Angle resolved velocity distributions of sputtered tungsten atoms

A. Goehlich, H. Dobele, Norbert Niemoller, 1999 .

Statistical tests to determine spatial correlations in the response behavior of PUF

Holger Vogt, Andreas Goehlich, Benjamin Willsch, 2016, 2016 12th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME).

Anisotropy effects in physical sputtering investigated by laser-induced fluorescence spectroscopy

A. Goehlich, H. Döbele, N. Niemoeller, 2000 .

Angular resolved energy distributions of sputtered atoms at low bombarding energy

A. Goehlich, H. Döbele, D. Gillmann, 2000 .

An experimental investigation of angular resolved energy distributions of atoms sputtered from evaporated aluminum films

A. Goehlich, H. Döbele, D. Gillmann, 2001 .

Determination of time-of-flight distributions of sputtered oxygen and carbon atoms by resonant multi-photon ionization

A. Goehlich, H. Döbele, A. Goehlich, 2000 .

Angle resolved velocity distributions of sputtered medium Z atoms

A. Goehlich, H. Döbele, N. Niemoeller, 1997 .

Investigation of time-of-flight and energy distributions of atoms and molecules sputtered from oxygen-covered metal surfaces by laser-aided techniques

A. Goehlich, 2001 .

Angle resolved velocity distributions of sputtered aluminum atoms

A. Goehlich, H. Döbele, 1996 .

Determination of the velocity distribution of sputtered atomic oxygen by laser-induced fluorescence in the vacuum-ultraviolet (130 nm)

A. Goehlich, H. Döbele, M. Röwekamp, 1991 .

Analytical model for thin-film SOI PIN-diode leakage current

Holger Vogt, Uwe Paschen, Andreas Goehlich, 2017 .