K. Machida

Characterization of Micromachined Coplanar Waveguides on Silicon up to 300 GHz

H. Kyuragi, T. Nagatsuma, H. Ishii, 1999, 1999 29th European Microwave Conference.

The selective excitation of lithium isotopes by intracavity nonlinear absorption in a CW dye laser

M. Yamashita, K. Machida, H. Kashiwagi, 1978 .

Integrated MEMS LC Resonator with Sealed Air-Suspended Structure for Single-Chip RF LSIs

Hiroki Morimura, Kei Kuwabara, Norio Sato, 2007, 2007 IEEE International Electron Devices Meeting.

RF CMOS-MEMS Switch with Low-Voltage Operation for Single-Chip RF LSIs

Hiroki Morimura, Kei Kuwabara, Norio Sato, 2006, 2006 International Electron Devices Meeting.

A thick-Cu process for add-on interconnections using photosensitive varnish for thick interlayer dielectric

H. Kyuragi, T. Kumazaki, H. Ishii, 2000, Proceedings of the IEEE 2000 International Interconnect Technology Conference (Cat. No.00EX407).

Three-dimensional millimeter-wave photonic integrated circuits on Si

A. Hirata, T. Nagatsuma, A. Sasaki, 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

Ultrahigh-speed 1.55-/spl mu/m photodiodes on Si with low-loss millimeter-wave waveguides

Y. Royter, T. Minotani, A. Hirata, 2000, LEOS 2000. 2000 IEEE Annual Meeting Conference Proceedings. 13th Annual Meeting. IEEE Lasers and Electro-Optics Society 2000 Annual Meeting (Cat. No.00CH37080).

A micromechanical switch as the logic elements for circuits in multi chip module on Si (MCM-Si)

A. Hirata, H. Kyuragi, A. Hirata, 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).