Hongliang Li

Ultraprecision grinding of TiC-based cermet hemisphere couples

B. Guo, Qingliang Zhao, Hongliang Li, 2014 .

Study on particle removal during the Co post-CMP cleaning process

Yuansheng Cheng, Hongliang Li, Chenwei Wang, 2021 .

Effect of Benzotriazole and 5-Methyl/1-H Carboxyl Benzotriazole on Chemical Mechanical Polishing of Cobalt in H2O2 Based Slurry

Yuansheng Cheng, Hongliang Li, Chenwei Wang, 2021, ECS Journal of Solid State Science and Technology.

Effect of UV Radiation on Oxidation for Ru CMP

Jianwei Zhou, Hongliang Li, Chenwei Wang, 2021 .