R. Böhme

发表

Backside etching of fused silica with Nd:YAG laser

K. Zimmer, L. Hartwig, B. Rauschenbach, 2006 .

Low Cost Metallisation Based on Ni/Cu Plating Enabling High Efficiency Industrial Solar Cells

J. Horzel, A. Brand, B. Lee, 2014 .

RELIABLE CONTACT FORMATION FOR INDUSTRIAL SOLAR CELLS BY LASER ABLATION AND NI/CU PLATING

J. Horzel, A. Brand, B. Lee, 2016 .

Mechanism of backside etching of transparent materials with nanosecond UV-lasers

M. Ehrhardt, K. Zimmer, B. Rauschenbach, 2010 .

Backside etching of UV-transparent materials at the interface to liquids

Klaus Zimmer, Rico Böhme, A. Braun, 2002 .

Backside laser etching of fused silica using liquid gallium

K. Zimmer, B. Rauschenbach, R. Böhme, 2006 .

Laser-induced backside wet etching of glasses and crystals

R. Böhme, 2007 .

Backside etching of fused silica with ultra-short laser pulses at the interface to absorbing liquid

M. Ehrhardt, K. Zimmer, S. Pissadakis, 2007 .

In situ reflectivity investigations of solid/liquid interface during laser backside etching

T. Otto, K. Zimmer, R. Böhme, 2006 .

Laser etching of transparent materials at a backside surface adsorbed layer

D. Hirsch, K. Zimmer, R. Böhme, 2006 .

Laser backside etching of fused silica with ultra-short pulses

K. Zimmer, S. Pissadakis, R. Böhme, 2006 .

Adsorbed layer etching of fused silica by excimer laser with nanometer depth precision

K. Zimmer, B. Rauschenbach, R. Böhme, 2005 .

Precise etching of fused silica for refractive and diffractive micro-optical applications

K. Zimmer, R. Böhme, 2005 .

The influence of the laser spot size and the pulse number on laser-induced backside wet etching

K. Zimmer, R. Böhme, 2005 .

Topography and roughness evolution of microstructured surfaces at laser-induced backside wet etching

K. Zimmer, B. Rauschenbach, J. Zajadacz, 2005 .

Excimer laser-induced material modification to create nanometer high smooth patterns in glass using mask projection

K. Zimmer, R. Böhme, D. Ruthe, 2007 .

Surface characterization of backside-etched transparent dielectrics

D. Spemann, K. Zimmer, R. Böhme, 2004 .

Sub-micron periodic structuring of sapphire by laser induced backside wet etching technique.

K. Zimmer, S. Pissadakis, R. Böhme, 2007, Optics express.

Laser-induced Writing of Submicron Surface Relief Gratings in Fused Silica on the Fly

R. Böhme, 2007 .

Laser backside etching of fused silica due to carbon layer ablation

K. Zimmer, B. Rauschenbach, R. Böhme, 2006 .

Enhancing the Etch Rate at Backside Etching of Fused Silica

K. Zimmer, B. Rauschenbach, R. Böhme, 2006 .

Effects of halogenated organic solvents on laser-induced backside wet etching of fused silica

K. Zimmer, R. Böhme, 2006 .

The reduction of the threshold fluence at laser-induced backside wet etching due to a liquid-mediated photochemical mechanism

K. Zimmer, R. Böhme, 2007 .

Ultra-short laser processing of transparent material at the interface to liquid

M. Ehrhardt, K. Zimmer, S. Pissadakis, 2006 .

Backside etching of fused silica with UV laser pulses using mercury

D. Hirsch, K. Zimmer, B. Rauschenbach, 2006 .

Time-resolved measurements during backside dry etching of fused silica

K. Zimmer, B. Hopp, R. Böhme, 2009 .

Sub-wavelength ripples in fused silica after irradiation of the solid/liquid interface with ultrashort laser pulses

K. Zimmer, B. Hopp, R. Böhme, 2008, Nanotechnology.

Nano-Patterning by Diffraction Mask-Projection Laser Ablation

K. Zimmer, B. Rauschenbach, T. Höche, 2008 .

Nanoscale laser patterning of thin gold films

F. Syrowatka, B. Rauschenbach, T. Höche, 2006 .

Large area metal dot matrices made by diffraction mask projection laser ablation

K. Zimmer, B. Rauschenbach, T. Höche, 2008 .

Local growth of vertical aligned carbon nanotubes by laserinduced surface modification of coated silicon substrates

K. Zimmer, B. Rauschenbach, R. Böhme, 2007 .

Synthesis and dynamic compaction of ceramic nano powders by techniques based on electric pulsed power

Y. Kotov, R. Böhme, H. Karow, 1995 .

Ablation of polymer foils for backside opening of thin film layered flexible polymer substrates

Klaus Zimmer, Christian Scheit, Rico Böhme, 2009 .

Laser-Induced Backside Wet Etching of Transparent Materials with Organic and Metallic Absorbers

K. Zimmer, R. Böhme, 2008 .

Local growth of aligned carbon nanotubes at surface sites irradiated by pulsed laser

K. Zimmer, B. Rauschenbach, R. Böhme, 2008 .

Indirect laser etching of fused silica: Towards high etching rate processing

K. Zimmer, R. Böhme, 2007 .

Stimulation of the local growth of aligned carbon nanotubes by pulse laser exposure of the substrate

K. Zimmer, B. Rauschenbach, R. Böhme, 2007 .

Using IR laser radiation for backside etching of fused silica

K. Zimmer, B. Rauschenbach, R. Böhme, 2007 .

Direct laser etching of transparent materials: high quality surface patterning and figuring for micro-optical applications

Klaus Zimmer, Bernd Rauschenbach, Rico Böhme, 2006, International Conference on Correlation Optics.

Precise etching of fused silica for micro-optical applications

Klaus Zimmer, Rico Böhme, K. Zimmer, 2005 .

Laser etching of fused silica using an adsorbed toluene layer

Klaus Zimmer, Bernd Rauschenbach, Rico Böhme, 2004 .

Stress Relaxation of Mono and Polydisperse Polystyrene.

A. Tobolsky, R. Böhme, R. Schaffhauser, 1964 .

Nanostructures by diffraction mask projection laser ablation

B. Rauschenbach, T. Höche, J. Gerlach, 2010 .

The influence of laser-induced surface modifications on the backside etching process

K. Zimmer, B. Rauschenbach, R. Böhme, 2007 .

Semiconductor Nanowires Prepared by Diffraction-Mask-Projection Excimer-Laser Patterning

Klaus Zimmer, Frank Frost, Bernd Rauschenbach, 2004 .

Towards an Industrial Laser Doping Process for the Selective Emitter Using Phosphoric Acid as Dopant

J. Bonse, J. Krüger, R. Böhme, 2011 .

Progress in Laser-Based Foil Metallization for Industrial PERC Solar Cells

R. Preu, J. Nekarda, R. Böhme, 2014 .

Backside Etching at the Interface to Diluted Medium with Nanometer Etch Rates

K. Zimmer, B. Rauschenbach, R. Böhme, 2006 .