T. Oyama

发表

Rapid nanopatterning of a Zr-based metallic glass surface utilizing focused ion beam induced selective etching

N. Morita, J. Taniguchi, N. Kawasegi, 2006 .

Development and its Applications of Diamond Array Tool using Silicon Mold (1st Report)

Tsutomu Obata, N. Morita, N. Kawasegi, 2004 .

Depth control of a silicon structure fabricated by 100q keV Ar ion beam lithography

N. Morita, J. Taniguchi, N. Kawasegi, 2007 .

Nanoscale fabrication in aqueous KOH solution using tribo-nanolithography

N. Morita, N. Kawasegi, N. Takano, 2005 .

3D Micro-Fabrication using Combination Technique of Nano-scale Processing and Chemical Etching (4th Report, Mechanism of Masking Effect)

N. Morita, N. Kawasegi, N. Takano, 2005 .

Micro-Fabrication of Single Crystal Silicon by Using Combination Technique of Nano-scale Machining and Alkaline Etching (2nd Report)

N. Morita, Guoxing Liao, N. Kawasegi, 2004 .

Morphological Control of a Tribo-Nanolithography-Induced Amorphous Silicon Phase for Three-Dimensional Lithography

N. Morita, N. Kawasegi, N. Takano, 2007 .

Development and Its Applications of Diamond Array Tool Using Silicon Mold (2nd Report): -Fabrication of Machining Cantilever with Arbitrary Tip Shape -@@@－任意切れ刃を持った加工用カンチレバーの作製－

Tsutomu Obata, N. Morita, N. Kawasegi, 2006 .

Sub-micrometer-scale patterning on Zr-based metallic glass using focused ion beam irradiation and chemical etching

N. Morita, J. Taniguchi, N. Kawasegi, 2007 .

Etch stop of silicon surface induced by tribo-nanolithography

Shigeru Yamada, Tatsuo Oyama, Kiwamu Ashida, 2005 .