U. Munch

Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array

Christian Menolfi, Oliver Paul, Qiuting Huang, 2001 .

Metal film protection of CMOS wafers against KOH

O. Brand, H. Baltes, O. Paul, 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

A Novel Method to Measure Poisson's Ratio of Thin Films

H. Baltes, O. Paul, V. Ziebart, 1997 .

Mechanical properties of thin films from the load deflection of long clamped plates

Oliver Paul, J. Schwizer, Henry Baltes, 1998 .

Industrial CMOS technology for thermal imagers

H. Baltes, U. Munch, 2000 .

Micromachined CMOS calorimetric chemical sensor with on-chip low noise amplifier

O. Brand, C. Menolfi, H. Baltes, 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

Stress analysis of a standard CMOS process

Henry Baltes, Oliver Paul, Elko Doering, 1999, Smart Materials, Nano-, and Micro- Smart Systems.