M. Lai

Development of an Alkaline-Compatible Porous-Silicon Photolithographic Process

G. Parish, A. Keating, J. Dell, 2011, Journal of Microelectromechanical Systems.

Porous silicon and its application for micromachining technologies

M. Lai, 2011 .

Thermal effects on LPCVD amorphous silicon

Pooi See Lee, A. Agarwal, M. Lai, 2006 .

Surface Morphology Control of Passivated Porous Silicon Using Reactive Ion Etching

G. Parish, A. Keating, Yinong Liu, 2012, Journal of Microelectromechanical Systems.

Reactive ion etching of porous silicon for MEMS applications

G. Parish, A. Keating, Yinong Liu, 2010, 2010 Conference on Optoelectronic and Microelectronic Materials and Devices.

Multilayer porous silicon diffraction gratings operating in the infrared

S. Bhattacharya, G. Parish, A. Keating, 2012, Nanoscale Research Letters.