Chisato Fukai

Fast Deposition of Microcrystalline Silicon Using High-Density SiH4 Microwave Plasma

Hajime Shirai, Hiroyuki Ueyama, H. Shirai, 1999 .

Optical emission spectroscopy study toward high rate growth of microcrystalline silicon

H. Shirai, K. Azuma, Y. Sakuma, 2001 .

Low-Temperature Plasma-Enahanced Chemical Vapor Deposition of Crystal Silicon Film from Dichlorosilane

Haiping Liu, H. Shirai, Chisato Fukai, 2001 .

Enhanced Crystallinity at Initial Growth Stage of Microcrystalline Silicon on Corning #7059 Glass Using SiH2Cl2

Takuya Nakamura, Hajime Shirai, H. Shirai, 1999 .

Growth kinetics of nanocrystalline silicon from SiH2Cl2 by plasma-enhanced chemical vapor deposition

H. Shirai, Y. Sakuma, Yoshimizu Moriya, 2000 .