Tetsuya Shinjo

发表

New advanced BARC and gap fill materials based on sublimate reduction for 193nm lithography

Satoshi Takei, Yusuke Horiguchi, Tetsuya Shinjo, 2006, SPIE Advanced Lithography.

New chemical approach for resist poisoning problem in via first dual-damascene process

Satoshi Takei, Tetsuya Shinjo, Yasuyuki Nakajima, 2006, SPIE Advanced Lithography.

Development of multi-layer process materials for hyper-NA lithography process

Makoto Nakajima, Keisuke Hashimoto, Tetsuya Shinjo, 2008, Lithography Asia.

Novel approach of UV cross-link process for advanced planarization technology in 32-45 nm lithography

Satoshi Takei, Yusuke Horiguchi, Tetsuya Shinjo, 2007, SPIE Advanced Lithography.

Effect of solvents and cross-link reaction group concentration on via filling performance in gap fill materials

Satoshi Takei, Tetsuya Shinjo, Yasushi Sakaida, 2007, SPIE Advanced Lithography.

Spin-on-carbon-hardmask with high wiggling resistance

Rikimaru Sakamoto, Ryo Karasawa, Keisuke Hashimoto, 2012, Other Conferences.

Wet-recess gap-fill materials for an advanced dual damascene process

Satoshi Takei, Yusuke Horiguchi, Tetsuya Shinjo, 2007, SPIE Advanced Lithography.

ARC and gap fill material with high etch rate for advanced dual damascene process

Satoshi Takei, Anwei Qin, Tetsuya Shinjo, 2005, SPIE Advanced Lithography.

High-etch-rate bottom-antireflective coating and gap-fill materials using dextrin derivatives in via first dual-damascene lithography process

Satoshi Takei, Keisuke Hashimoto, Tetsuya Shinjo, 2008, SPIE Advanced Lithography.

Study of Self Cross-Link Bottom Antireflective Coating and Gap Fill Materials for Sublimate Defect Reduction in ArF Lithography

Satoshi Takei, Tetsuya Shinjo, Yasushi Sakaida, 2007 .

Gap Fill Materials Using Cyclodextrin Derivatives in ArF Lithography

Satoshi Takei, Tetsuya Shinjo, Yasushi Sakaida, 2007 .

Study of High Etch Rate Bottom Antireflective Coating and Gap Fill Materials Using Dextrin Derivatives in ArF Lithography

Satoshi Takei, Tetsuya Shinjo, Yasushi Sakaida, 2007 .