S Franssila

Poly(dimethylsiloxane) electrospray devices fabricated with diamond-like carbon-poly(dimethylsiloxane) coated SU-8 masters.

A Manz, A. Manz, R. Kostiainen, 2003, Lab on a chip.

Stroboscopic supercontinuum white-light interferometer for MEMS characterization.

E Hæggström, E. Hæggström, V. Heikkinen, 2012, Optics letters.

The fabrication of silicon nanostructures by local gallium implantation and cryogenic deep reactive ion etching

I. Tittonen, S. Franssila, K. Grigoras, 2009, Nanotechnology.