D. C. Carter

Control of reactive sputtering processes

D. J. Christie, W. Sproul, D. Christie, 2005 .

Control of reactive sputtering process using two reactive gases

Sören Berg, Tomas Nyberg, D. J. Christie, 2003 .

Effective Closed-Loop Control for Reactive Sputtering Using Two Reactive Gases

D. J. Christie, W. Sproul, D. Christie, 2004 .