E. Takii

Junction Profile Engineering with a Novel Multiple Laser Spike Annealing Scheme for 45-nm Node High Performance and Low Leakage CMOS Technology

T. Miyashita, T. Sugii, S. Satoh, 2007, 2007 IEEE International Electron Devices Meeting.

First Quantitative Observation of Local Temperature Fluctuation in Millisecond Annealing

S. Satoh, T. Yamamoto, T. Sukegawa, 2007, 2007 15th International Conference on Advanced Thermal Processing of Semiconductors.