K. Kosaka

Development of nonresonant ultrasonic motor with sub-nanometer resolution

Tadahiro Ohmi, Hiroshi Kubota, Akira Nakada, 2002, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings..

Sub-nanometer resolution ultrasonic motor for 300 mm wafer lithography precision stage

Hiroshi Kubota, T. Harada, Akira Nakada, 2001 .

0.69 nm resolution ultrasonic motor for large stroke precision stage

Tadahiro Ohmi, H. Kubota, T. Harada, 2001, Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516).

Sub-nanometer resolution ultrasonic motor for 300 mm wafer lithography precision stage

H. Kubota, T. Harada, K. Kosaka, 2001, Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468).