Tae-Eog Lee

Virtual control - a virtual cluster tool for testing and verifying a cluster tool controller and a scheduler

Yong-Jae Joo, Tae-Eog Lee, 2004, IEEE Robotics & Automation Magazine.

Scheduling single-armed cluster tools with reentrant wafer flows

Tae-Eog Lee, Hwan-Yong Lee, Hwan-Yong Lee, 2006, IEEE Transactions on Semiconductor Manufacturing.

SECAM: a supervisory equipment control application model for integrated semiconductor manufacturing equipment

Tae-Eog Lee, Jin-Hwan Lee, Jin-Hwan Lee, 2004, IEEE Robotics & Automation Magazine.