W. R. Sinclair

Bilevel high resolution photolithographic technique for use with wafers with stepped and/or reflecting surfaces

R. G. Vadimsky, K. L. Tai, M. Rand, 1979 .

Oxidation of Sputtered Niobium Nitride Films

P. K. Gallagher, G. W. Kammlott, W. R. Sinclair, 1983 .