H. Pötzl

Quantitative distribution analysis of dopant elements in silicon with SIMS for the improvement of process modelling

R. Tielert, Manfred Grasserbauer, E. Guerrero, 1983 .

Generalized Model for the Clustering of As Dopants in Si

R. Tielert, Manfred Grasserbauer, E. Guerrero, 1982 .

Determination of the Retarded Diffusion of Antimony by SIMS Measurements and Numerical Simulations

U. Gösele, Manfred Grasserbauer, W. Jungling, 1986 .