L. C. Ortiz

Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity

Thomas W. Kenny, Kenneth E. Goodson, Eldwin J. Ng, 2019, Journal of Microelectromechanical Systems.

An Oven-Controlled MEMS Oscillator (OCMO) With Sub 10mw, ± 1.5 PPB Stability Over Temperature

T. Kenny, Yunhan Chen, D. D. Shin, 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).

Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators

T. Kenny, I. Flader, Yunhan Chen, 2020, Journal of Microelectromechanical Systems.

FIRST FATIGUE MEASUREMENTS ON THICK EPI-POLYSILICON MEMS IN ULTRA-CLEAN ENVIRONMENT

T. Kenny, I. Flader, Yunhan Chen, 2018 .