P. V. Bui

Characteristics and Mechanism of Catalyst-Referred Etching Method: Application to 4H-SiC

Kazuto Yamauchi, Yoshitada Morikawa, Yasuhisa Sano, 2018, Int. J. Autom. Technol..

Chemical etching of silicon carbide in pure water by using platinum catalyst.

Y. Sano, K. Yamauchi, S. Matsuyama, 2017, Applied physics letters.

Catalyzed chemical polishing of SiO2 glasses in pure water.

Y. Sano, K. Yamauchi, S. Matsuyama, 2019, The Review of scientific instruments.

Study on the mechanism of platinum-assisted hydrofluoric acid etching of SiC using density functional theory calculations

Y. Sano, K. Yamauchi, K. Inagaki, 2015 .

Study of Terminated Species on 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching

T. Okamoto, Y. Sano, K. Yamauchi, 2013 .

Adsorption of hydrogen fluoride on SiC surfaces: A density functional theory study

Y. Sano, K. Yamauchi, K. Inagaki, 2012 .

First-Principles Study of Reaction Process of SiC and HF Molecules in Catalyst-Referred Etching

Y. Sano, K. Yamauchi, K. Inagaki, 2012 .