W. Legner

MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°C

Wolfgang Legner, Hans-Jörg Fecht, Dimitri Telitschkin, 2012 .

Structural and electronic characterization of β-SiC films on Si grown from mono-methylsilane precursors

S. Rushworth, G. Müller, W. Legner, 1995 .

Surface ionization detection of amine containing drugs

Wolfgang Legner, Gian Carlo Cardinali, Ivan Elmi, 2013 .

Chemical Contamination Sensor for Phosphate Ester Hydraulic Fluids

Wolfgang Legner, Gerhard Müller, Sumit Paul, 2010 .

Microthruster with integrated platinum thin film resistance temperature detector (RTD), heater, and thermal insulation

Wolfgang Legner, Hans-Jörg Fecht, Dimitri Telitschkin, 2011, Microtechnologies.

Silicon Carbide As A Mechanical Material

G. Krotz, G. Muller, W. Legner, 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°C

A. Friedberger, T. Ziemann, N. Miyakawa, 2012, Microsystem Technologies.