R. Fullowan

Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators

J. F. Miner, J. E. Bower, Raymond A. Cirelli, 2007 .

Pattern placement correction methodology for 200 mm SCALPEL masks

Michael J. Lercel, William J. Dauksher, Myrtle I. Blakey, 2001 .

Evaluation of a 100 kV thermal field emission electron-beam nanolithography system

D. Tennant, R. Fullowan, D. M. Tennant, 2000 .