I. Gracia

Residual Stress Measurement on a MEMS Structure With High-Spatial Resolution

C. Cane, B. Michel, N. Sabate, 2007, Journal of Microelectromechanical Systems.

Optimized multi-frequency temperature modulation of microhotplate gas sensors

E. Llobet, J. Brezmes, C. Cane, 2004, Proceedings of IEEE Sensors, 2004..

A test structure for the design of thermal flow sensors

C. Cane, N. Sabate, J. Santander, 2002, Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002..