Yoshiyuki Watanabe

Five-axis motion sensor with electrostatic drive and capacitive detection fabricated by silicon bulk micromachining

Takashi Mineta, Seiya Kobayashi, Toshiaki Mitsui, 2002 .

5-Axis Motion Sensor using SOI Wafer and the Design Method

Susumu Sugiyama, Takashi Mineta, Toshiaki Mitsui, 2006 .

Development of an Electromagnetically Driven Optical MEMS Mirror with Functions of Z-Axis Vibration and X, Y Bi-Directional Tilting, and an Application to Low Coherent Optical Interferometer

Shinnosuke Iwamatsu, Toshiaki Mitsui, Yoshiyuki Watanabe, 2008 .

Electromagnetic silicon MEMS resonator

Yutaka Abe, Yoshiyuki Watanabe, Toru Yahagi, 2019, Electrical Engineering in Japan.

Electromagnetically Driven Dual-axis Tilting MEMS Grating for Near Infrared Spectroscopy

Seiya Kobayashi, Toru Yahagi, Shinnosuke Iwamatsu, 2011 .

Batch fabricated flat winding shape memory alloy actuator for active catheter

Masayoshi Esashi, Takashi Mineta, Seiya Kobayashi, 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

The Microassembly Technique for a 3D Single Crystalline Silicon Structure Using a Polyimide/Chromium Cantilever

Takashi Mineta, Seiya Kobayashi, T. Mineta, 1999 .

Electrochemichal Pulse Etching for Micromachining of NiTi Shape Memory Alloy Sheet

Takashi Mineta, Seiya Kobayashi, Toshiaki Mitsui, 2002 .

Active Catheter Using Multi-Link-Joint Structure Fabricated in Silicon Wafer

Masayoshi Esashi, Yoichi Haga, Takashi Mineta, 1999 .

5-Axis Capacitive Motion Sensor Fabricated by Silicon Micromachining Technique

Takashi Mineta, Seiya Kobayashi, Toshiaki Mitsui, 2001 .