Nobumitsu Taniguchi

Five-axis motion sensor with electrostatic drive and capacitive detection fabricated by silicon bulk micromachining

Takashi Mineta, Seiya Kobayashi, Toshiaki Mitsui, 2002 .

Development of Micro-machined Three-axis Sensors in Venture Business

Shigeo Takagi, Nobumitsu Taniguchi, Kazuhiro Okada, 2001 .

5-Axis Capacitive Motion Sensor Fabricated by Silicon Micromachining Technique

Takashi Mineta, Seiya Kobayashi, Toshiaki Mitsui, 2001 .