Yuh-Ching Su

Novel Sidewall Capping for Degradation-Free Damascene Trenches of Low-Permittivity Methylsilsesquioxane

Ching-Fa Yeh, Yueh-Chuan Lee, Yuh-Ching Su, 2000 .

Comprehensive Investigation on Fluorosilicate Glass Prepared by Temperature‐Difference‐Based Liquid‐Phase Deposition

Ching-Fa Yeh, Yueh-Chuan Lee, Yuh-Ching Su, 2000 .