A. Mai

High-bandwidth, waveguide-coupled Ge p-i-n photodiode with high C- and L-band responsivity

K. Petermann, D. Knoll, K. Voigt, 2015, 2015 IEEE 12th International Conference on Group IV Photonics (GFP).

Accurate Depth Control of Through-Silicon Vias by Substrate Integrated Etch Stop Layers

M. Kaynak, M. Wietstruck, S. Marschmeyer, 2017, 2017 IEEE 67th Electronic Components and Technology Conference (ECTC).

SiGe BiCMOS Technology with 3.0 ps Gate Delay

D. Knoll, B. Tillack, R. Barth, 2007, 2007 IEEE International Electron Devices Meeting.

Industrial large scale silicon nitride deposition on photovoltaic cells with linear microwave plasma sources

D. Roth, A. Mai, A. Mai, 2003 .

High-performance photonic BiCMOS process for the fabrication of high-bandwidth electronic-photonic integrated circuits

D. Knoll, R. Barth, K. Voigt, 2015, 2015 IEEE International Electron Devices Meeting (IEDM).