Q. X. Zhang

Tunable MEMS LC resonator with large tuning range

Ai Qun Liu, A. Yu, A. Liu, 2005 .

Optical Switch Using Draw-Bridge Micromirror for Large Array Crossonnects

Ai Qun Liu, V. M. Murukeshan, Q. X. Zhang, 2001 .

Micromachined DC contact capacitive switch on low-resistivity silicon substrate

Ai Qun Liu, Arokiaswami Alphones, A. B. Yu, 2006 .

A New Approach of Lateral RF MEMS Switch

Ai Qun Liu, Ajay Agarwal, M. Tang, 2004 .

A nano-actuator via cavity-enhanced optical dipole force

J. Wu, J. F. Tao, D. Kwong, 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

Tolerance analysis for comb-drive actuator using DRIE fabrication

Ai Qun Liu, J. Li, A. Liu, 2006 .

Fabrication technique for microelectromechanical systems vertical comb-drive actuators on a monolithic silicon substrate

Ai Qun Liu, Jian Li, A. B. Yu, 2005 .

An approach of lateral RF MEMS switch for high performance

Ai Qun Liu, Ajay Agarwal, J.-M. Huang, 2003, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003..

Improvement of isolation for MEMS capacitive switch via membrane planarization

Ai Qun Liu, Lei Zhu, Arokiaswami Alphones, 2005 .

MEMS Optical Logic NOR Gate using Integrated Tunable Lasers

J. Tamil, B. Liu, H. Cai, 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.