Broc Stirton

A comprehensive comparison of spectral scatterometry hardware

Lawrence Lane, Kevin R. Lensing, Broc Stirton, 2005, SPIE Advanced Lithography.

Implementation of Nonthreaded Estimation for Run-to-Run Control of High Mix Semiconductor Manufacturing

Kameshwar Poolla, Anand Subramanian, Broc Stirton, 2013, IEEE Transactions on Semiconductor Manufacturing.

Integrated metrology and wafer-level contro

Kevin R. Lensing, Broc Stirton, 2006 .

On the Initialization of Threaded Run-to-Run Control of Semiconductor Manufacturing

Tyrone L. Vincent, Kameshwar Poolla, Anand Subramanian, 2014, IEEE Transactions on Semiconductor Manufacturing.

Characterizing and resolving unobservability in run-to-run control of high mix semiconductor manufacturing

Tyrone L. Vincent, Kameshwar Poolla, Anand Subramanian, 2013, 52nd IEEE Conference on Decision and Control.